FIB-SEM with integrated Raman spectrometry
The combination of Raman spectrometry and SEM imaging techniques allows researchers to extend the analytical capabilities of SEMs. Raman imaging is a well-known spectroscopic method used for obtaining sample information about the spatial distribution of chemical and molecular composition. It can also be used to generate 2D and 3D images and depth profiles to visualise the distribution of the molecular compounds within a sample. Raman spectrometry is suitable not only for phase identification but can also help to characterise the state of the material under study.