The MASTER 320 is comprised of an inlet system, residual gas analyzer, diaphragm vacuum pump, and turbo pump. The inlet system utilizes a heated quartz or stainless steel capillary up to 350ºC. This hea ng helps to prevent sample gas vapors from condensing during analysis.
The MASTER 320 is capable of sampling in mass ranges of 1-100 amu, 1-200 amu, and 1-300 amu.