MIRA3
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MIRA3 is a high performance SEM system which features a high brightness Schottky emitter for achieving high resolution and low-noise imaging. MIRA3 offers all the advantages that come with the latest technologies and developments in SEM; delivering faster image acquisition, an ultra-fast scanning system, dynamic and static compensation and built-in scripting for user-defined applications.
Features
- High brightness Schottky emitter for high-resolution/high current/low-noise imaging
- Unique Wide Field Optics™ design with a proprietary Intermediate Lens (IML) offering a variety of working and displaying modes, for enhanced field of view or depth of focus, etc.
- Real-time In-Flight Beam Tracing™ for performance and beam optimization, which also allows direct and continuous control of the beam and beam current
- Beam Deceleration Technology (BDT) for excellent resolution at low beam voltages
- Excellent imaging at short working distances with the powerful In-Beam detector (optional)
- All MIRA3 chambers provide superior specimen handling using a 5-axis fully motorized compucentric stage and have ideal geometry for EDX and EBSD
- Optional extra-large chambers (XM, GM) with robust stages able to accommodate large samples including large wafers (6″, 8″, 12″) are also available
- Numerous interface ports with optimized analytical geometry for attaching EDX, WDX and EBSD detectors and many others
- Investigation of non-conductive samples in variable pressure modes
- Several options for chamber suspension type ensure effective reduction of ambient vibrations in the laboratory
- Non-distorted EBSD pattern
Applications
Images
