Field Emission Scanning Electron Microscope | SEM5000
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CIQTEK SEM5000 is a high-resolution, feature-rich field emission scanning electron microscope (FE-SEM, FEG SEM).
Advanced column design, high voltage tunneling technology (SuperTunnel), low aberration non-leakage magnetic objective lens design, to achieve low-voltage high-resolution imaging, while magnetic samples can be applied. Optical navigation, advanced automatic functions, well-designed human-machine interaction, and optimized operation.
Whether experienced or not, one can quickly get started with high-resolution shooting tasks.
Accesories
- Autosampler AS-500 with optional rinse station Argon humidifier.
- Introduction system kits for improved performance (small volume, organics, Hydrofluoric acid, high total dissolved solids).
- Concomitant Metals Analyzer for simultaneous measurement of hydride forming elements and other elements.
- Oxygen kit for alkali elements in organics.
Features
- High-resolution imaging at low accelerating voltage.
- The electromagnetic compound mirror reduces aberrations, significantly improves resolution at low voltages, and allows observation of magnetic samples.
- High-pressure tunneling technology (SuperTunnel), where the electrons in the tunnel can maintain high energy, reducing space charge effects and ensuring low voltage resolution.
- The electronic optical path without crossover effectively reduces system aberration and improves resolution.
- Water-cooled constant temperature objective lens, to ensure the stability, reliability, and repeatability of the objective lens work.
- Magnetic deflection six-hole adjustable diaphragm, automatic switching diaphragm hole, no mechanical adjustment, to achieve high-resolution observation or large beam analysis mode fast switching.
Specifications
- Electron Gun : High-brightness Schottky Field Emission Electron Gun
- Resolution : 1.0 nm @ 15 kV 1.5 nm @ 1 kV
- Magnification : 1 ~ 2,500,000 x
- Acceleration Voltage : 20 V ~ 30 kV
- Sample Table : Five-axis automatic sample table
Applications
Parameters
| Key Parameters | Resolution | 1.0 nm @ 15 kV, SE 1.5 nm @ 1 kV, SE0.8 nm @ 30 kV, STEM |
| Acceleration voltage | 20 V ~ 30 kV | |
| Magnification | 1 ~ 2,500,000 x | |
| Electron Gun | High brightness Schottky Field Emission Electron Gun | |
| Sample Chamber | Vacuum System | Fully automatic control, oil-free vacuum system |
| Camera | Dual Cameras (Optical navigation + in-bin monitor) | |
| Distance | X: 120 mm, Y: 115 mm, Z: 50 mm T: -10°~ +90°, R: 360° (*Optional extra-large bin version available) | |
| Detectors and Extensions | Standard | The high-angle electronic detector in the lens column The side low-angle electronic detector |
| Optional | Flush-mounted mid-angle backscattered electron detector Automatic retractable scanning transmission electron microscopy (STEM) detector Sample exchange chamber High-speed beam gate and electron beam exposure Energy dispersive spectroscopy (EDS/EDX) Electron Backscatter Diffraction (EBSD) Electron-beam-induced current (EBIC) Cathodoluminescence (CL) High and low temperature in-situ stretching table nanoManipulator Large-Scale Image StitchingTrackball & Knob Control Panel | |
| Software | Operating System | Windows |
| Navigation | Optical Navigation, Gesture Quick Navigation | |
| Automatic Functions | Auto Brightness Contrast, Auto Focus, Automatic Dissipation |