Models | SEM3200A | SEM3200 | ||
---|---|---|---|---|
Electro-Optical Systems | Electron Gun | Pre-aligned medium-sized fork-type tungsten filament | ||
Resolution | High Vaccum | 3 nm @ 30 kV (SE) | ||
4 nm @ 30 kV (BSE) | ||||
8 nm @ 3 kV (SE) | ||||
*Low Vaccum | 3 nm @ 30 kV (SE) | |||
Magnification | 1-300,000x (Film Magnification) | |||
1-1000,000x (Screen Magnification) | ||||
Acceleration Voltage | 0.2 kV ~ 30 kV | |||
Probe Current | ≥1.2μA, Real-time display | |||
Imaging Systems | Detector | Secondary Electron Detector (ETD) | ||
*Backscattered electron detector (BSED), *low vacuum secondary electron detector, *energy spectrometer EDS, etc. | ||||
Image Format | TIFF, JPG, BMP, PNG | |||
Vacuum System | Vacuum Model | High Vacuum | Better than 5×10-4 Pa | |
Low Vacuum | 5 ~ 1000 Pa | |||
Control Mode | Fully automatic control | |||
Sample Chamber | Camera | Optical Navigation | ||
Monitoring in the Sample Chamber | ||||
Sample Table | Three Axis Automatic | Five Axis Automatic | ||
Distance | X: 120 mm | X: 120 mm | ||
Y: 115 mm | Y: 115 mm | |||
Z: 50 mm | Z: 50 mm | |||
/ | R: 360° | |||
/ | T: -10° ~ +90° | |||
Software | Operating System | Windows | ||
Navigations | Optical Navigation, Gesture Quick Navigation | |||
Automatic Functions | Auto Brightness Contrast, Auto Focus, Automatic Dissipation | |||
Special Functions | Intelligent Assisted Dispersion, *Large-Scale Image Stitching (Optional accessories) | |||
Installation Requirements | Space | L≥ 3000 mm, W ≥ 4000 mm, H ≥ 2300 mm | ||
Temperature | 20°C (68°F) ~ 25°C (77°F) | |||
Humidity | ≤ 50 % | |||
Power Supply | AC 220 V(±10 %), 50 Hz, 2 kVA |