Plasma Profiling Time Of Flight Mass Spectrometer
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PP-TOFMS couples a glow discharge plasma to an ultra-fast time of flight mass spectrometer and provides chemical analysis of solid materials as function of depth.
Features
- Fast and direct analysis
- The High-Density Plasma results in high Sputtering Rate and allows for Measuring Thick Layers up to 100 μm.
- Despite the mm size crater formed, layers as thin as 1 nm are measured.
- The separation of sputtering and ionization processes in the discharge volume gives the capability of a Calibration Free Semi Quantitative Analysis.
- The use of pulsed RF excitation permits the analysis of conductive and insulating, inorganics, organics, and hydrides materials or layers.
- In contrast with sequential mass spectrometers, TOFMS offers full mass spectrum at any depth, offering elemental (from H to U) and molecular information, including isotopic monitoring.
- The Temporal Ion response over the RF source period is capitalised for high sensivity and to avoid isobaric interferences.
- Enhance Signal to Noise ratio
- Multidimensional Software
Applications
- Photovoltaics
- Photonics rare earths
- Ion implantation
- Hybrid materials
- Electrodes of Li batteries
- Corrosion studies
- Materials science
- Photovoltaics
- Photonics rare earths
- Ion implantation
- Hybrid materials
- Materials science
- Corrosion studies
- Electrodes of Li batteries
Downloads
PP_TOMS_April_2014.pdf
PP-TOFMS_flyer.pdf